Accession Number : ADA327202

Title :   Electron Specimen Interaction in Low Voltage Electron Beam Lithography,

Corporate Author : OREGON STATE UNIV CORVALLIS

Personal Author(s) : Liu, Weidong

PDF Url : ADA327202

Report Date : JUL 1995

Pagination or Media Count : 9

Abstract : Enclosed are a number of monthly technical reports from July to October 95. A great deal of effort is devoted to investigation and designing of photocathode activation chamber, electron gun, electron beam analysis chamber.

Descriptors :   *ELECTRON BEAMS, *ELECTRON GUNS, *PHOTOCATHODES, TEST AND EVALUATION, ACTIVATION, CHAMBERS, ULTRAHIGH VACUUM, ELECTRON OPTICS.

Subject Categories : Electrical and Electronic Equipment
      Test Facilities, Equipment and Methods
      Particle Accelerators

Distribution Statement : APPROVED FOR PUBLIC RELEASE