Accession Number : ADA327202
Title : Electron Specimen Interaction in Low Voltage Electron Beam Lithography,
Corporate Author : OREGON STATE UNIV CORVALLIS
Personal Author(s) : Liu, Weidong
PDF Url : ADA327202
Report Date : JUL 1995
Pagination or Media Count : 9
Abstract : Enclosed are a number of monthly technical reports from July to October 95. A great deal of effort is devoted to investigation and designing of photocathode activation chamber, electron gun, electron beam analysis chamber.
Descriptors : *ELECTRON BEAMS, *ELECTRON GUNS, *PHOTOCATHODES, TEST AND EVALUATION, ACTIVATION, CHAMBERS, ULTRAHIGH VACUUM, ELECTRON OPTICS.
Subject Categories : Electrical and Electronic Equipment
Test Facilities, Equipment and Methods
Distribution Statement : APPROVED FOR PUBLIC RELEASE