Accession Number : ADA327952
Title : Small Lot Repair/Manufacture of Microcircuit Boards by Laser Deposition.
Descriptive Note : Final rept. 01 Jan-30 Jun 97,
Corporate Author : CM CONSULTING
Personal Author(s) : Church, Kenneth H.
PDF Url : ADA327952
Report Date : 01 AUG 1997
Pagination or Media Count : 17
Abstract : Report developed under SBIR contract. Studied the feasibility of using Laser Chemical Vapor Deposition (LCVD) technology to repair electronic boards and to manufacture small lot microcircuit boards. An LCVD system was built and a gold organometallic gas was synthesized for the process. Gold patterns with line widths ranging from a few microns up to 200 microns were written. Various substrates (Alumina, Polyimide, Silicon Nitride) were written on to determine the diversity of the process. A larger system capable of housing 2 feet in two directions, was designed on paper. The proposed system would be capable of removing unwanted metal, via ablation and laying down new metal in any desired area with sub-micron accuracy. The LCVD technique parallels much of the current technology in laser ablation and trimming. Sub-micron accuracy, laser sources, vision systems and chemical vapor deposition are well developed areas Integrating these areas to do LCVD specifically will be a straight forward task. The areas in this technology that will need to be improved is the write rates and resolution that is achievable using conventional lasers and optics. It is the opinion of this company that this technology can be used immediately in the hybrid microcircuit and older monolithic microcircuit arena and with further research will compete with photolithography in the semiconductor business.
Descriptors : *CHEMICAL VAPOR DEPOSITION, *LASERS, *MICROCIRCUITS, ABLATION, ORGANOMETALLIC COMPOUNDS, SUBSTRATES, SEMICONDUCTORS, REPAIR, ALUMINUM OXIDES, CIRCUIT BOARDS, MONOLITHIC STRUCTURES(ELECTRONICS), GOLD, PHOTOLITHOGRAPHY, SILICON NITRIDES, HYBRID CIRCUITS, POLYIMIDE RESINS.
Subject Categories : Lasers and Masers
Mfg & Industrial Eng & Control of Product Sys
Electrical and Electronic Equipment
Distribution Statement : APPROVED FOR PUBLIC RELEASE