Accession Number : ADA329547

Title :   Final Technical Report for Microelectromechanical Photonic Switches.

Descriptive Note : Final rept. 15 Dec 93-14 Feb 97,

Corporate Author : TEXAS INSTRUMENTS INC DALLAS

Personal Author(s) : Collins,

PDF Url : ADA329547

Report Date : 11 JUL 1997

Pagination or Media Count : 38

Abstract : TI has successfuly fabricated asymmetrical micromirrors up to 350 um long for fiber-optic shutter applications. We overcame the challenge of maintaining straightness in mirror sizes 50 microns by modifying the conventional micromirror process. There are several different options for process modeling and optimization. We chose a corrugated structure because of the simple process modification and optimum bending curvature. Modeling showed a 41-fold curvature reduction. Fabricated corrugated structures exhibited a 19.8X straightness improvement. In addition, a simple layout design niodifaction to increase the tile angle provided a boost in shutter performance. We consolidated first-pass results from working asymmetrical rnirrors to design and fabricate a second chip to be packaged in a miniaturized 4 x 4 fiber-optic crossbar system. A 350 micron long mirror with a r-micron spacer enables the mirror to block 80 micron beams. We designed and fabricated a package to host the crossbar swtich points.

Descriptors :   *FIBER OPTICS, *ELECTRONIC SWITCHES, OPTIMIZATION, MODIFICATION, CHIPS(ELECTRONICS), PHOTONICS, CURVATURE, SHUTTERS(OPTICS), MICROMECHANICS, WIDE ANGLES, CAMERA SHUTTERS, PHOTOMICROGRAPHY.

Subject Categories : Electrooptical and Optoelectronic Devices
      Fiber Optics and Integrated Optics

Distribution Statement : APPROVED FOR PUBLIC RELEASE