Accession Number : ADA329768
Title : A Nano-Modulated Ceramic Coating Deposition System.
Descriptive Note : Final rept. 1 Aug 95-31-Jul 96,
Corporate Author : NORTHWESTERN UNIV EVANSTON IL BASIC INDUSTRY RESEARCH LAB
Personal Author(s) : Sproul, William D. ; Lefkow, Anthony R.
PDF Url : ADA329768
Report Date : 31 OCT 1996
Pagination or Media Count : 14
Abstract : This report outlines the design, construction, and implementation of a Nano-modulated ceramic coating deposition system. The deposition system was designed to deposit multilayer (superlattice) coatings of two or more oxide or other non-conducting materials. The system has two cathodes opposed to each other with their magnetic fields forming a closed loop, which enhances the current into the substrate. The deposition system takes advantage of the latest developments in vacuum and characterization technologies to ensure a repeatable process. It is equipped with cryopumps on the main chamber and the load lock for fast pumpdown and minimization of system contamination. Peripheral equipment includes an rf plasma probe for determination in real time of the plasma impedance, and an in-situ ellipsometer for real time characterization of one of the films making up the superlattice.
Descriptors : *CERAMIC COATINGS, *DEPOSITION, CATHODES, CLOSED LOOP SYSTEMS.
Subject Categories : Coatings, Colorants and Finishes
Distribution Statement : APPROVED FOR PUBLIC RELEASE