Accession Number : ADA332327

Title :   An Intelligent Reactor for Controlled Sputter Deposition of Ceramic Oxide Nanolaminates

Descriptive Note : Final rept.

Corporate Author : WISCONSIN UNIV-MILWAUKEE

Personal Author(s) : Aita, Carolyn R.

PDF Url : ADA332327

Report Date : 06 FEB 1997

Pagination or Media Count : 10

Abstract : A single piece of equipment was purchased, consisting of a multiple cathode, radio frequency-excited sputter deposition apparatus that is entirely automated. The equipment is custom-made, was designed and built by TM Vacuum Products, Inc., 630 Warrington Avenue, Cinnaminson, NJ. A contact person is Louis Mozdzen at (609) 829-2000 ext 108. A detailed description of the equipment is attached. The equipment does not differ from that described in the original grant proposal. The equipment is used to fabricate thin film ceramic nanolaminates. These nanolaminates consist of multilayer stacks in which the consistents are usually polycrystalline. Unique mechanical and chemical properties are achieved because of the nanoscale of each bilayer. These properties include transformation-toughening, enhanced hardness, high temperature stability, and corrosion resistance. A related patent entitled 'Multilayer Nanolaminates Containing Polycrystalline Zirconia,' has been issued (US No. 5,472,795, C.R. 'Atita', 12/5/95, name misspelling correction issued 5/17/96) This patent was developed under DoD funding. To date we have used the equipment to fabricate multilayers of zirconia-alumina, zirconia-yttria, yttria-alumina, titania-zirconia, and titanium nitride-aluminum nitride.

Descriptors :   *INSTRUMENTATION, *ELECTRODEPOSITION, THIN FILMS, THERMAL STABILITY, CERAMIC MATERIALS, CATHODES, CORROSION RESISTANCE, ZIRCONIUM OXIDES, POLYCRYSTALLINE, NANOTECHNOLOGY.

Subject Categories : Laminates and Composite Materials
      Mfg & Industrial Eng & Control of Product Sys
      Test Facilities, Equipment and Methods

Distribution Statement : APPROVED FOR PUBLIC RELEASE