Accession Number : ADA332382
Title : Particulate Contaminant Formation and Transport in Microelectronic Manufacturing Processes. Phase 2.
Descriptive Note : Quarterly rept. no. 7,
Corporate Author : CFD RESEARCH CORP HUNTSVILLE AL
Personal Author(s) : Stout, P. J. ; Krishnan, A. ; Rao, N. P. ; Girshick, S. L. ; Kushner, M. J.
PDF Url : ADA332382
Report Date : NOV 1997
Pagination or Media Count : 15
Abstract : This is the seventh quarterly report documenting the work performed during a two year Phase II STTR activity entitled "Particulate contaminant formation and transport in microelectronic manufacturing processes." The overall objective is to produce a charging, transport, and growth simulation (CTGS) tool that can be used effectively by equipment manufacturers and users to reduce particle generation in fabrication systems. The project includes collaborations with Prof. Steven Girshick (University of Minnesota) on ion induced nucleation and Prof. Mark J. Kushner (University of Illinois) on particle charging and transport.
Descriptors : *MICROELECTRONICS, *CONTAMINANTS, SIMULATION, IONS, METHODOLOGY, MANUFACTURING, GROWTH(GENERAL), FABRICATION, NUCLEATION, PARTICLES, TRANSPORT, PARTICULATES, SILICON COMPOUNDS.
Subject Categories : Electrical and Electronic Equipment
Atomic and Molecular Physics and Spectroscopy
Distribution Statement : APPROVED FOR PUBLIC RELEASE