Accession Number : ADA332690

Title :   A Reliable Calibration Method for an Ion Current Controlled Electron Beam Transition Metal Deposition Source

Corporate Author : ARIZONA STATE UNIV TEMPE DEPT OF PHYSICS

Personal Author(s) : Bullock, E. T. ; Coyle, S. T. ; Hembree, G. G. ; Scheinfein, M. R.

PDF Url : ADA332690

Report Date : 1993

Pagination or Media Count : 17

Abstract : An alternative ion current controlled calibration scheme has been implemented for electron beam transition metal (Co) deposition sources. A repeatable and practical means of positioning the source (tip), measuring the ion flux and determining the flux rate is given. Intrinsic variations in the structural parameters and thermal effects which can modify the growth rate are examined and compensated for. A stable regime where ion beam current is directly proportional (+/- 5%) to the growth rate is determined.

Descriptors :   *ELECTRON BEAMS, *COBALT, *IONIC CURRENT, ION BEAMS, ELECTRON TRANSITIONS, ELECTRON FLUX, ION DENSITY, ELECTRODEPOSITION.

Subject Categories : Particle Accelerators
      Properties of Metals and Alloys

Distribution Statement : APPROVED FOR PUBLIC RELEASE