Accession Number : ADA332690
Title : A Reliable Calibration Method for an Ion Current Controlled Electron Beam Transition Metal Deposition Source
Corporate Author : ARIZONA STATE UNIV TEMPE DEPT OF PHYSICS
Personal Author(s) : Bullock, E. T. ; Coyle, S. T. ; Hembree, G. G. ; Scheinfein, M. R.
PDF Url : ADA332690
Report Date : 1993
Pagination or Media Count : 17
Abstract : An alternative ion current controlled calibration scheme has been implemented for electron beam transition metal (Co) deposition sources. A repeatable and practical means of positioning the source (tip), measuring the ion flux and determining the flux rate is given. Intrinsic variations in the structural parameters and thermal effects which can modify the growth rate are examined and compensated for. A stable regime where ion beam current is directly proportional (+/- 5%) to the growth rate is determined.
Descriptors : *ELECTRON BEAMS, *COBALT, *IONIC CURRENT, ION BEAMS, ELECTRON TRANSITIONS, ELECTRON FLUX, ION DENSITY, ELECTRODEPOSITION.
Subject Categories : Particle Accelerators
Properties of Metals and Alloys
Distribution Statement : APPROVED FOR PUBLIC RELEASE