Accession Number : ADA334742
Title : Laterally Defined Nanoscale Structures: Film Growth, Chemistry, and Transport
Descriptive Note : Final rept. 1 Jan 94-30 Sep 97
Corporate Author : WISCONSIN UNIV-MADISON DEPT OF MATERIALS SCIENCE AND ENGINEERING
Personal Author(s) : Lagally, Max G.
PDF Url : ADA334742
Report Date : SEP 1997
Pagination or Media Count : 8
Abstract : This final technical report for AFOSR Grant No. F49620-94-1-0113, entitled Laterally Defined Nanoscale Structures: Film Growth, Chemistry, and Transport, summarizes the work performed on this grant. The research aims were to investigate film growth, chemistry, and electronic and atomic transport on laterally defined nanostructures. The objective of this research was to develop methodologies for creating nanoscale patterns in surfaces using scanned-probe techniques, either through assembly of molecules on surfaces or by the removal of atoms or molecules from an existing structure. Because of initial success in our laboratories in increasing the speed of operation of scanned probes, the emphasis changed in the last 1-1/2 years to explorations of the viability of high-speed parallel nanolithography for creating patterns.
Descriptors : *MOLECULES, *GROWTH(GENERAL), *THIN FILMS, *SEMICONDUCTOR DEVICES, *CHEMISTRY, *TRANSPORT PROPERTIES, *ATOMIC PROPERTIES, SCANNING, PROBES, REMOVAL, SIZES(DIMENSIONS), ELECTRON TRANSPORT, ATOMS, LITHOGRAPHY, PARALLEL ORIENTATION.
Subject Categories : Physical Chemistry
Atomic and Molecular Physics and Spectroscopy
Distribution Statement : APPROVED FOR PUBLIC RELEASE