Accession Number : ADA335574

Title :   JPRS Report, Science & Technology, Japan, Polymers for Microelectronics.

Corporate Author : JOINT PUBLICATIONS RESEARCH SERVICE ARLINGTON VA

PDF Url : ADA335574

Report Date : 16 JAN 1990

Pagination or Media Count : 88

Abstract : POLYMERS FOR MICROELECTRONICS Selected abstracts from PME '89 POLYMERS FOR MICROELECTRONICS held 29 Oct - 2 Nov 89 in Tokyo, sponsored by the Japan Society of Radiation Chemistry and cosponsored by the Japan Society of Polymer Science and the Chemical Society of Japan

Descriptors :   *POLYMERS, *MICROELECTRONICS, *RADIATION CHEMISTRY, CHEMICALS, ABSTRACTS, JAPAN, LITHOGRAPHY, IRRADIATION.

Subject Categories : Radiation and Nuclear Chemistry
      Polymer Chemistry
      Electrical and Electronic Equipment

Distribution Statement : APPROVED FOR PUBLIC RELEASE