Accession Number : ADA338675

Title :   Damage Modes and Mechanisms of Si-Ge Films Under Prompt Soft X-Ray Radiation

Corporate Author : AEROSPACE CORP EL SEGUNDO CA MECHANICSAND MATERIALS TECHNOLOGY CENTER

Personal Author(s) : Gyetvay, Sandra R. ; Chang, Dick J. ; Muki, Rokuro

PDF Url : ADA338675

Report Date : 13 MAY 1992

Pagination or Media Count : 22

Abstract : Thermal and residual stresses in films exposed to sudden temperature changes are analyzed based on an elastoplastic brittle idealization of film response. The results thus obtained are used to explain qualitatively the damage mechanisms of various failure modes observed in Si-Ge film deposited on a single crystal Si substrate exposed to soft x-ray radiation for a short duration of time.

Descriptors :   *SOFT X RAYS, *SILICON COATINGS, DAMAGE ASSESSMENT, THIN FILMS, SUBSTRATES, RESIDUAL STRESS, THERMAL STRESSES, RADIATION EFFECTS, ELASTOPLASTICITY, RADIATION DAMAGE.

Subject Categories : Coatings, Colorants and Finishes
      Nuclear Physics & Elementary Particle Physics
      Mechanics

Distribution Statement : APPROVED FOR PUBLIC RELEASE