Accession Number : ADA339091

Title :   Silicon Micromechanical Optical Waveguide for Modulation and Sensing

Descriptive Note : Final rept.

Corporate Author : MOSCOW INST OF PHYSICS AND TECHNOLOGY DOLGOPRUDNYI (RUSSIA)

Personal Author(s) : Churenkov, A. V.

PDF Url : ADA339091

Report Date : 12 OCT 1995

Pagination or Media Count : 21

Abstract : The microstructure, optical and mechanical properties of the silicon micromechanical optical waveguide are investigated. The physical principles of mechanical excitation of the cantilever waveguide by photothermal, magnetostriction, and by direct force action are considered. The sensor application of the developed device is analyzed.

Descriptors :   *OPTICAL PROPERTIES, *OPTICAL DETECTION, *WAVEGUIDES, *SILICON, *MODULATION, *MICROMECHANICS, MECHANICAL PROPERTIES, MICROSTRUCTURE, DETECTORS, EXCITATION, RUSSIA, MAGNETOSTRICTION, CANTILEVER BEAMS.

Subject Categories : Electricity and Magnetism
      Optics

Distribution Statement : APPROVED FOR PUBLIC RELEASE