Accession Number : ADB045304
Title : Cantilever Accelerometer.
Descriptive Note : Final rept. Oct 77-Aug 79,
Corporate Author : SIGNETICS CORP SUNNYVALE CA
Personal Author(s) : Rosvold, Warren C.
Report Date : DEC 1979
Pagination or Media Count : 43
Abstract : Two accelerometer models were designed, manufactured and evaluated during the contract term. These were built using combinations of poly and monocrystalline silicon for temperature insensitivity and high gauge factor. The basic physical structure on both models was the 'H' geometry. Thermal insensitivity was further enhanced via packaging in a self-regulating heater polymer. (Author)
Descriptors : *ACCELEROMETERS, *SOLID STATE ELECTRONICS, *THIN FILM RESISTORS, *MEASUREMENT, INTEGRATED CIRCUITS, FABRICATION, PACKAGING, PHYSICAL PROPERTIES, SILICON COMPOUNDS, LOW COSTS, HEATERS, MODELS, POLYMERS, SELF OPERATION, OXIDES, LAYERS, THERMAL PROPERTIES, RESISTANCE, COEFFICIENTS, POLYSILICONS, CRYSTAL GROWTH.
Subject Categories : Electrical and Electronic Equipment
Test Facilities, Equipment and Methods
Distribution Statement : APPROVED FOR PUBLIC RELEASE