Accession Number : ADD001889
Title : Technique for Fabricating Vacuum Waveguide in the X-Ray Region.
Descriptive Note : Patent,
Corporate Author : DEPARTMENT OF THE NAVY WASHINGTON D C
Personal Author(s) : Anderson,John P
Report Date : 08 Jul 1975
Pagination or Media Count : 3
Abstract : This invention pertains to a method of fabricating vacuum waveguides in the x-ray region. It comprises the following steps: (a) Selecting an optically flat substrate; (b) Depositing a film of metal on the substrate; (c) Photoetching a line corresponding to the width of the waveguide in the metal film; (d) Selecting a parylene pellicle; (e) Depositing a metal film on one side of the pellicle; (f) Depositing a film perpendicular to the length of the waveguide on the opposite side of the pellicle; (g) Placing the pellicle in fixture which applies slight pressure to the pellicle (stretching the pellicle over the substrate); and, (h) Evacuating the fixture.
Descriptors : *Patents, *Waveguides, *Vapor deposition, *Plating, X rays, Vacuum chambers
Subject Categories : Physical Chemistry
Test Facilities, Equipment and Methods
Distribution Statement : APPROVED FOR PUBLIC RELEASE