Accession Number : ADD002791
Title : Flash Melting Method for Producing New Impurity Distributions in Solids.
Descriptive Note : Patent,
Corporate Author : DEPARTMENT OF THE NAVY WASHINGTON D C
Personal Author(s) : Marquardt,Charles L ; Giuliani,John F
Report Date : 24 Feb 1976
Pagination or Media Count : 6
Abstract : This invention relates generally to producing impurity concentration profiles in solids and particularly to methods of producing semiconductor devices and optical waveguides. An impurity concentration profile is established in a solid by attaching the solid to heat sink and irradiating it with one or more fast laser pulses. The impurity may initially be located in a surface layer or it may be dispersed throughout the solid.
Descriptors : *Patents, *Solids, *Impurities, *Semiconductor doping, Heat sinks, Semiconductor devices, Laser beams, Concentration(Composition), Dispersing, Surfaces, Optical waveguides, Ion implantation
Subject Categories : Electrical and Electronic Equipment
Mfg & Industrial Eng & Control of Product Sys
Distribution Statement : APPROVED FOR PUBLIC RELEASE