Accession Number : ADD004753

Title :   Method and Apparatus for Semiconductor Profiling Using an Optical Probe.

Descriptive Note : Patent,

Corporate Author : DEPARTMENT OF THE NAVY WASHINGTON D C

Personal Author(s) : Lile,Derek L ; Davis,Neil M

Report Date : 27 Sep 1977

Pagination or Media Count : 9

Abstract : A method and apparatus of determining defects in semiconductors, by scanning with small spot of light. As the semiconductor is scanned, a voltage is generated which may be used to indicate gross defects as well as the reduction in carrier lifetime due to the defects. (Author)

Descriptors :   *Patents, *Semiconductors, *Probes, Optical equipment, Defects(Materials), Profiles, Optical scanning

Subject Categories : Electrical and Electronic Equipment
      Test Facilities, Equipment and Methods
      Optics
      Solid State Physics

Distribution Statement : APPROVED FOR PUBLIC RELEASE