Accession Number : ADD005114

Title :   Direct Measurement of the Electron Beam of a Scanning Electron Microscope.

Descriptive Note : Patent,

Corporate Author : DEPARTMENT OF THE NAVY WASHINGTON D C

Personal Author(s) : Vaughan,William H

Report Date : 25 Apr 1978

Pagination or Media Count : 9

Abstract : Apparatus for measuring the electron beam diameter of a scanning electron microscope includes: a transducer which supports a heated wire acting as a knife edge; an electron collector; and a display. The electron beam is scanned across the knife edge to obtain a change in current density which is received by the electron collector and shown as a trace on the display. This trace is a relative measurement of electron beam diameter. The electron beam is scanned a second time with the transducer moving the heated wire abruptly during the second scan to cause a shift in the current density trace on the display. The amount of shift between the traces of the initial and second scans is a reference distance against which the relative measurement of electron beam diameter may be measured. (Author)

Descriptors :   *Patents, *Electron microscopes, *Electronic scanners, Electron beams, Wire, Diameters, Test equipment

Subject Categories : Test Facilities, Equipment and Methods

Distribution Statement : APPROVED FOR PUBLIC RELEASE