Accession Number : ADD006240

Title :   Nozzle Beam Type Metal Vapor Source.

Descriptive Note : Patent,


Personal Author(s) : Vig,John R ; Hafner,Erich ; Andres,Ronald P

Report Date : 14 Nov 1978

Pagination or Media Count : 10

Abstract : The patent concerns a novel, high-flux source for the use in the vapor deposition of electrode materials, such as gold, during the fabrication of precision quartz-crystal resonators, or the like. The design is based on the theory and technology of nozzle beams. The nozzle beam type source disclosed herein is conceived: (1) to permit large deposition rates with minimum wastage of electrode material; (2) to operate in high vacuum; (3) to emit vapor in a horizontal direction, thereby permitting the use of a pair of sources to plate both sides of a substrate simultaneously; and (4) to operate for extended periods of time without requiring frequent breaking of the vacuum in order to replenish the source. It is estimated that this design can operate at a deposition rate equal or above that of a conventional evaporation-type source with less than one percent of the wastage of electrode material experienced with a conventional source.

Descriptors :   *Patents, *Vapor deposition, *Nozzles, Fabrication, Electrodes, Gold, High vacuum

Subject Categories : Fabrication Metallurgy

Distribution Statement : APPROVED FOR PUBLIC RELEASE