Accession Number : ADD006466

Title :   Microcircuit Fine Leak Test Apparatus.

Descriptive Note : Patent,

Corporate Author : DEPARTMENT OF THE ARMY WASHINGTON DC

Personal Author(s) : White ,James W ; Ruwe,Victor W

Report Date : 26 Jun 1979

Pagination or Media Count : 8

Abstract : A plurality of fine leak test chambers for fast individual testing of hermetically plated microelectronic devices. Each microcircuit component, having already been subjected to a controlled environment of 5 percent helium and 95 percent nitrogen and then assembled, is placed in the chambers and sealed therein. The chambers are evacuated and helium flow rate (if present) is measured by a spectrometer. (Author)

Descriptors :   *Patents, *Leak detectors, Leakage(Fluid), Helium

Subject Categories : Test Facilities, Equipment and Methods
      Fluid Mechanics

Distribution Statement : APPROVED FOR PUBLIC RELEASE