Accession Number : ADD006879

Title :   Electron Collector for Forming Low-Loss Electron Images.

Descriptive Note : Patent,


Personal Author(s) : Christou,Aristos

Report Date : 18 Dec 1979

Pagination or Media Count : 8

Abstract : In a scanning electron beam system wherein a primary beam of electrons is scanned over the surface of a specimen and electron images are genrated by collecting electrons scattered from the surface, and improved electron collector for selectively collecting the primary electrons that have suffered low loss in being scattered by the surface. Three symmetrically shaped mesh grids are arranged in front of a scintillator in the path of the backscattered electrons. The grids are disposed relative to each other and biased so that the electric fields permit passage of electrons with a narrow energy range. The scintillator is coated with a layer of tantalum and a layer of gold to provide thermal stability and resistance to damage from bombardment by high-energy electrons. (Author)

Descriptors :   *Patents, *Electron microscopes, Electron spectroscopy, Electron energy

Subject Categories : Test Facilities, Equipment and Methods
      Particle Accelerators

Distribution Statement : APPROVED FOR PUBLIC RELEASE