Accession Number : ADD006994

Title :   Nondestructive Analysis of Multilayer Roughness Correlation.

Descriptive Note : Patent Application,

Corporate Author : DEPARTMENT OF THE NAVY WASHINGTON DC

Personal Author(s) : Elson,John M

Report Date : 26 Dec 1979

Pagination or Media Count : 24

Abstract : This invention pertains to non-destructive measurement techniques of microroughness cross-correlation properties between boundary layers in multilayered dielectrics. In particular, this invention pertains to a method for evaluating the overall cross-correlation nature of multilayered dielectric stacks based on comparisons between the measured angular distribution of scattered light and the calculated distributions of scattered light for various dielectric stack models. The various models are based on different cross-correlation properties. (Author)

Descriptors :   *Patent applications, *Nondestructive testing, Measurement, Boundary layer, Layers, Roughness, Inventions, Light scattering, Cross correlation, Distribution, Dielectric properties, Models, Optical properties, Absorption, Mirrors, Deposition

Subject Categories : Test Facilities, Equipment and Methods
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Distribution Statement : APPROVED FOR PUBLIC RELEASE