Accession Number : ADD008501
Title : A Nozzle Beam Source for Vapor Deposition.
Descriptive Note : Patent Application,
Corporate Author : DEPARTMENT OF THE ARMY WASHINGTON DC
Personal Author(s) : Ney,Robert J ; Hafner,Erich
Report Date : 15 Dec 1980
Pagination or Media Count : 7
Abstract : This application discloses a nozzle beam source for use in the vapor deposition of electrode materials such as gold, during the fabrication of precision quartz-crystal resonators, or the like. The nozzle beam source includes a graphite crucible and source tube, a tungsten wick within the source tube, and graphite-to-graphite mechanical seals.
Descriptors : *Patent applications, Quartz resonators, *Electrodeposition, *Vapor deposition, Gold, Electrodes, Nozzles, Heating, Melting, Crucibles, Graphite, Copper, Aluminum, Beam forming
Subject Categories : Electrical and Electronic Equipment
Distribution Statement : APPROVED FOR PUBLIC RELEASE