Accession Number : ADD008765

Title :   Method of Making Integrated Waveguide Cavities.

Descriptive Note : Patent,

Corporate Author : DEPARTMENT OF THE AIR FORCE WASHINGTON DC

Personal Author(s) : Chao,Chente ; Nakaji,Edward M ; Bernick,Robert L

Report Date : 21 Jul 1981

Pagination or Media Count : 4

Abstract : This invention provides a method for forming a waveguide cavity as a step in the process of diode fabrication. Semiconductor diodes are formed in a conventional manner. A plate of waveguide material having a thickness equivalent to waveguide height and slots corresponding to waveguide width is bonded to semiconductor wafer containing a number of diodes. The slots are formed to correspond to rows a diodes, so that when bonded the diodes are centered in the slot. The package may then divided as needed and the sides and thickness of the slot form the waveguide. (Author)

Descriptors :   *Patents, *Cavities, *Waveguides, *Impatt diodes, Fabrication, Inventions, Width, Thickness, Diodes, Height

Subject Categories : Electrical and Electronic Equipment

Distribution Statement : APPROVED FOR PUBLIC RELEASE