Accession Number : ADD009325
Title : Method of Manufacturing a Field-Emission Cathode Structure.
Descriptive Note : Patent,
Corporate Author : DEPARTMENT OF THE NAVY WASHINGTON DC
Personal Author(s) : Gray,Henry F ; Greene,Richard F
Report Date : 29 Dec 1981
Pagination or Media Count : 6
Abstract : The patent discloses a method of manufacturing a field-emitter array cathode structure in which a substrate of single crystal material is selectively masked such that the unmasked areas define islands on the underlying substrate. The single crystal material under the unmasked areas is orientation-dependent etched to form an array of holes whose sides intersect at a crystallographically sharp point. Following removal of the mask, the substrate is covered with a thick layer of material capable of emitting electrons which extends above the substrate surface and fills the holes. Thereafter, the material of the substrate underneath the layer of electron-emitting material is etched to expose a plurality of sharp field-emitter tips.
Descriptors : *Patents, *Manufacturing, *Methodology, *Cathodes, *Field emission, Structures, Substrates, Thickness, Layers, Removal, Masks, Single crystals, Surfaces, Etching
Subject Categories : Electrical and Electronic Equipment
Mfg & Industrial Eng & Control of Product Sys
Distribution Statement : APPROVED FOR PUBLIC RELEASE