Accession Number : ADD009440

Title :   Method of Forming Thin Niobium Carbonitride Superconducting Films of Exceptional Purity.

Descriptive Note : Patent,


Personal Author(s) : Francavilla,Thomas L ; Wolf,Stuart A

Report Date : 21 Jul 1981

Pagination or Media Count : 5

Abstract : Thin superconducting NbCN films are deposited by reactive sputtering onto a dielectric substrate inside a vacuum chamber. The substrate is heated to a temperature of 600-1200 C ultra-pure Argon is introduced into the chamber, and niobium is presputtered from a high-purity target onto a shutter. A cyanogen and nitrogen gas mixture is introduced into the chamber at a rate of approximately 10-6 Torr liters/sec, and a shutter is opened exposing the substrate to the sputtered niobium. The deposited niobium reacts with the cyanogen-nitrogen gas mixture to form NbCN films of exceptional purity, and which exhibit superior superconductor properties. (Author)

Descriptors :   *Patents, *Superconductors, *Films, *Purity, Substrates, Semiconducting films, Niobium compounds, Nitrogen, Mixtures, Sputtering, Argon, Dielectrics, Inventions

Subject Categories : Coatings, Colorants and Finishes
      Electricity and Magnetism

Distribution Statement : APPROVED FOR PUBLIC RELEASE