Accession Number : ADD009622

Title :   Evaporator Tool with Remote Substrate Reorientation Mechanism.

Descriptive Note : Patent,


Personal Author(s) : Mang,Guenter H

Report Date : 18 May 1982

Pagination or Media Count : 6

Abstract : An evaporation fixture for sequentially vapor depositing dielectric or other materials on the surface of a substrate at various slant and rotational angles without opening the fixture. A connecting rod extends from the exterior of the evaporation fixture to the interior of the fixture where it is connected to a cam mechanism. The cam mechanism is in turn mechanically coupled to a reorientation ring that is concentric with the substrate holding ring of the fixture. A slot in the reorientation ring is in engagement with the substrate holding mechanism connecting pin. Movement of the connecting rod at the end exterior to the evaporation fixture causes movement of the reorientation ring with respect to the holding ring and by means of the slot-pin coupling causes rotational and angular reorientation of the substrate with respect to the evaporated material. (Author)

Descriptors :   *Patents, *Evaporators, *Vapor deposition, *Connecting rods, Silicon dioxide, Evaporation, Substrates, Pins, Couplings, Dielectrics, Layers, Angles, Rotation, Inventions, Vacuum, Liquid crystals, Control, Cams

Subject Categories : Mfg & Industrial Eng & Control of Product Sys

Distribution Statement : APPROVED FOR PUBLIC RELEASE