Accession Number : ADD009816
Title : A Nozzle Beam Source for Vapor Deposition.
Descriptive Note : Patent Application,
Corporate Author : DEPARTMENT OF THE ARMY WASHINGTON DC
Personal Author(s) : Ney,Robert J ; Hafner,Erich
Report Date : 11 Aug 1982
Pagination or Media Count : 7
Abstract : A nozzle beam source for use in the vapor deposition of electrode materials such as gold, during the fabrication of precision quartz-crystal resonators, or the like is described. The nozzle beam source includes a graphite crucible and source tube, a tungsten wick within the source tube, and graphite-to-graphite mechanical seals.
Descriptors : *Patent applications, *Nozzles, *Vapor deposition, Gold, Electrodes, Materials, Crucibles, Tubes, Graphite, Sealed systems, Tungsten, Vapors, Inventions
Subject Categories : Fabrication Metallurgy
Distribution Statement : APPROVED FOR PUBLIC RELEASE