Accession Number : ADD010412
Title : Controlled Porosity Sheet for Thermionic Dispenser Cathode and Method of Manufacture.
Descriptive Note : Patent,
Corporate Author : DEPARTMENT OF THE NAVY WASHINGTON DC
Personal Author(s) : Thomas,Richard E ; Greene,Richard F
Report Date : 12 Apr 1983
Pagination or Media Count : 8
Abstract : A controlled porosity sheet defining a surface for a thermionic dispenser cathode and a method of manufacture. Starting with a generally flat silicon template substrate structure having an array of upstanding microposts 1-25 microns across on 5-100 micron spacings from each other, a layer of metal is deposited on the substrate to surround the microposts and cover the substrate structure to a desired depth. The metal layer is then abraded to a smooth, flat surface which exposes the microposts. Thereafter, the silicon substrate and microposts. Thereafter, the silicon substrate and microposts are completely etched away, leaving a metal sheet having micron-size holes therethrough.
Descriptors : *Patents, *Cathodes, *Sheets, *Porosity, Templates, Manufacturing, Methodology, Control, Dispensers, Layers, Metals, Silicon, Substrates, Inventions, Surfaces, Holes(Openings)
Subject Categories : Electrical and Electronic Equipment
Distribution Statement : APPROVED FOR PUBLIC RELEASE