Accession Number : ADD010712
Title : Method of Making Miniature High Frequency SC-Cut Quartz Crystal Resonators.
Descriptive Note : Patent Application,
Corporate Author : DEPARTMENT OF THE ARMY WASHINGTON DC
Personal Author(s) : Vig,J R ; Ballato,A
Report Date : 08 Dec 1983
Pagination or Media Count : 13
Abstract : Miniature high frequency SC-cut quartz crystal resonators are made form a plano-plano SC-cut quartz crystal wafer by chemically polishing the wafer; then chemomechanically polishing the chemically polished wafer; then chemically polishing the chemomechanically polished wafer; depositing a suitable pattern of etch resist on the wafer using standard photolithographic techniques; chemically polishing the wafer; stripping the photoresist from the wafer; placing a suitable evaporative mask pattern into intimate contact with the wafer; depositing a suitable pattern of electrodes on the wafer; testing the resonators so formed on the wafer; selectively separating those resonators having the desired properties; mounting the selected resonators into an enclosure; adjusting the frequency of the selected resonators to the exact frequency desired; and hermetically sealing the enclosure.
Descriptors : Patent applications, *Quartz resonators, *High frequency, *Fabrication, Methodology, Cutting, Wafers, Polishing, Deposition, Photolithography, Electrodes, Hermetic seals
Subject Categories : Electrical and Electronic Equipment
Mfg & Industrial Eng & Control of Product Sys
Distribution Statement : APPROVED FOR PUBLIC RELEASE