Accession Number : ADD010814

Title :   Electron Beam Peripheral Patterning of Integrated Circuits.

Descriptive Note : Patent Application,

Corporate Author : DEPARTMENT OF THE ARMY WASHINGTON DC

Personal Author(s) : Glendinning,W B

Report Date : 25 Jan 1984

Pagination or Media Count : 13

Descriptors :   *Patent applications, *Integrated circuits, *Fabrication, Photolithography, Electron beams, Replicas, Microelectronics, Silicon, Wafers

Subject Categories : Electrical and Electronic Equipment
      Mfg & Industrial Eng & Control of Product Sys
      Printing and Graphic Arts

Distribution Statement : APPROVED FOR PUBLIC RELEASE