Accession Number : ADD011057

Title :   Method for Making Josephson Junctions with Contamination-Free Interfaces Utilizing a ZnO Contact Insulator.

Descriptive Note : Patent,

Corporate Author : DEPARTMENT OF THE NAVY WASHINGTON DC

Personal Author(s) : Cukauskas,E J

Report Date : 27 Mar 1984

Pagination or Media Count : 9

Abstract : A method of fabricating Josephson junction integrated circuits in which the active layers are deposited within an ultra-high vacuum system during a single pumpdown of the system. Subsequent anisotropic etching defines the devices by etching away complete layers in some areas so as to isolate the Josephson junction device. (Author)

Descriptors :   *Patents, *Josephson junctions, *Integrated circuits, *Vacuum deposition, Etching, Impurities, Ultrahigh vacuum, Superconductors

Subject Categories : Electrical and Electronic Equipment
      Mfg & Industrial Eng & Control of Product Sys
      Quantum Theory and Relativity

Distribution Statement : APPROVED FOR PUBLIC RELEASE