Accession Number : ADD011653

Title :   Apparatus for Etching Vertical Junction Solar Cell Wafers.

Descriptive Note : Patent,

Corporate Author : DEPARTMENT OF THE AIR FORCE WASHINGTON DC

Personal Author(s) : Valley,C R

Report Date : 26 Feb 1985

Pagination or Media Count : 3

Abstract : An apparatus for etching semiconductor wafers which comprises a cylindrical vessel with a lid having associated cooling means, a basket assembly, rack means for holding a plurality of wafers, support means for supporting the basket assembly above the bottom of the vessel, and stirring means. (Author)

Descriptors :   *PATENTS, *SOLAR CELLS, *WAFERS, *SEMICONDUCTORS, CYLINDRICAL BODIES, STORAGE RACKS, COOLING, ASSEMBLY, STIRRERS, BOTTOM, SUPPORTS

Subject Categories : Electrical and Electronic Equipment
      Electric Power Production and Distribution
      Mfg & Industrial Eng & Control of Product Sys
      Solid State Physics

Distribution Statement : APPROVED FOR PUBLIC RELEASE