Accession Number : ADD012078

Title :   Elevated Transient Temperature Leak Test for Unstable Microelectronic Packages.

Descriptive Note : Patent,

Corporate Author : DEPARTMENT OF THE AIR FORCE WASHINGTON DC

Personal Author(s) : Goldfarb,Harold ; Perkins,Kenneth L ; Weigand,Bernard L

Report Date : 19 Nov 1985

Pagination or Media Count : 5

Abstract : A novel method and apparatus for detecting leaks in glass-to-metal seals of microelectronic devices and the like are described which comprise a double-gasketed vacuum station including a base plate having a central hole an a first gasket for exposing one side of the seals to a leak detector; a vacuum fixture surrounding athe device provides a marginal region therearound which can be evacuated to prevent helium from permeating the first gasket; the vacuum fixture includes a central opening to expose the other side of the seals to a helium containing atmosphere within a shroud enclosing the device and vacuum fixture; a second gasket provides a seal between the vacuum fixture and device periphery at the central opening in the fixture. For leak tests under controlled time/temperature conditions, an adjacent infrared lamp is used to radiantly heat the package containing the glass-to-metal seals, and a mask is included to avoid direct radiant heating of the gaskets and glass-to-metal seals.

Descriptors :   *PATENTS, *LEAK DETECTORS, *GLASS SEALS, *HERMETIC SEALS, *TEST FIXTURES, *METAL SEALS, ELECTRONIC EQUIPMENT, TEST EQUIPMENT, GASKETS, MICROELECTRONICS, SEALS(STOPPERS), VACUUM APPARATUS, HIGH TEMPERATURE, HEATING, SIDES, TEMPERATURE, METALS, CONTROL, GLASS, VACUUM, HELIUM, TIME

Subject Categories : Electrical and Electronic Equipment
      Test Facilities, Equipment and Methods

Distribution Statement : APPROVED FOR PUBLIC RELEASE