Accession Number : ADD012862
Title : Passivation of Hybrid Microelectronic Circuits.
Descriptive Note : Patent,
Corporate Author : DEPARTMENT OF THE NAVY WASHINGTON DC
Personal Author(s) : Rathbun,Bonnie L ; Schuessler,Philipp W
Report Date : 09 Dec 1986
Pagination or Media Count : 4
Abstract : Passivation of a hybrid microelectronic device is achieved by plasma polymerization of hexamethyldisilazane on the device surface. A moisture impermeable thin film layer is deposited which protects the moisture sensitive components from corrosion. The layer is readily removable, however, in order to effect repairs to the device when necessary.
Descriptors : *PATENTS, *MICROELECTRONICS, *HYBRID CIRCUITS, CORROSION, HYBRID SYSTEMS, REPAIR, PLANNING, MOISTURE, SENSITIVITY, PASSIVITY
Subject Categories : Electrical and Electronic Equipment
Distribution Statement : APPROVED FOR PUBLIC RELEASE