Accession Number : ADD012988
Title : Nondestructive Analysis of Multilayer Roughness Correlation.
Descriptive Note : Patent,
Corporate Author : DEPARTMENT OF THE NAVY WASHINGTON DC
Personal Author(s) : Elson,John M
Report Date : 22 Oct 1985
Pagination or Media Count : 10
Abstract : A method of evaluating the cross-correlation properties of microroughness present at the interfaces in dielectric stacks is based on a comparison between observed and calculated angular distribution of scattered light. The calculation is based on a first-order perturbation treatment of the interaction of a monochromatic plane wave with a dielectric stack which has microroughness present at each interface. The average deviation of the interface microroughness from the perfectly smooth, ideal, situation is assumed to be much less than the incident wavelength. The theory retains the vector nature of the electromagnetic fields, allows for complex dielectric constants, arbitrary angles of incidence, scattering and polarization. The dielectric stack may have any number of layers of arbitrary optical thickness. In practice, angular scattering data is measured for various incident angles with either p- or s-polarized light. These data are then compared to the calculated distribution of scattered light.
Descriptors : *PATENTS, *DIELECTRICS, *LIGHT SCATTERING, ANGLE OF INCIDENCE, ANGLES, CROSS CORRELATION, STACKING, ELECTROMAGNETIC FIELDS, INTERFACES, STACKING, NONDESTRUCTIVE TESTING, DISTRIBUTION, CONSTANTS, DIELECTRIC PROPERTIES, PERTURBATIONS, CORRELATION, LAYERS, ROUGHNESS, OPTICAL COATINGS, MONOCHROMATIC LIGHT, DIFFRACTION, WAVE FUNCTIONS, PROFILOMETERS, OPTICAL PROPERTIES, THICKNESS, POLARIZATION, SCATTERING
Subject Categories : Optics
Electricity and Magnetism
Distribution Statement : APPROVED FOR PUBLIC RELEASE