Accession Number : ADD013022
Title : Deposition of Compounds from Multi-Component Organo-Metals.
Descriptive Note : Patent,
Corporate Author : DEPARTMENT OF THE NAVY WASHINGTON DC
Personal Author(s) : Bottka,Nicholas ; Schwartz,Robert W ; Thun,Wayne E
Report Date : 18 Jun 1985
Pagination or Media Count : 3
Abstract : This invention relates to the preparation of temperature sensitive II-VI semiconductors by the decomposition via photolysis or low temperature thermolysis or pyrolysis of organo-metallic compounds. The present invention has overcome some of the previous problems by incorporating the desired target molecule to be deposited directly into the organo-metallic compound. The target molecule is chemically bonded within the organo-metallic compound until released by the breaking of the organo-metallic bonds. A film having the formula A superscript B superscript VIA wherin A IIB is a group IIB metal and B superscript is a chalcogenide is deposited upon a substrate by exposing the substrate to an environment containing a decomposable organo-metallic compound selected from the group consisting of R-X-M-X-R, R-M-X-M-R, R-M-X-R, R-M-CH2-X-R' and R-M-X-X-R' wherein: R and R' are each selected from the group consisting of hydrogen, an organic radical such as an alkyl or an aryl and an organic radical containing a heroatom; M is a group IIB metal; and X is a chalcogenide, followed by decomposing the organo-metallic compound through photolysis or low temperature thermolysis or pyrolysis to deposit a film including the target molecule that was within the organo-metallic compound.
Descriptors : *PATENTS, *ORGANOMETALLIC COMPOUNDS, *DEPOSITION, DECOMPOSITION, BONDED JOINTS, PHOTOLYSIS, DEPOSITS, PYROLYSIS, MOLECULES, TARGETS, HYDROGEN, SUBSTRATES, GROUP IIVI COMPOUNDS, SEMICONDUCTORS, SENSITIVITY, TEMPERATURE
Subject Categories : Inorganic Chemistry
Distribution Statement : APPROVED FOR PUBLIC RELEASE