Accession Number : ADD013063

Title :   Method for Fabricating Superconducting Weak-Links Using Electron Beam Lithography.

Descriptive Note : Patent, Filed 11 Jan 82, patented 2 Jul 85,

Corporate Author : DEPARTMENT OF THE NAVY WASHINGTON DC

Personal Author(s) : Lukens,James E ; Mankiewich,Paul M

Report Date : 02 Jul 1985

Pagination or Media Count : 5

Abstract : A method for fabricating indium variable thickness superconducting microbridges uses a single layer of electron resist and EBL to draw a mask which has a gap with a small amount of undercut. A thin layer of material is deposited at normal incidence to form the bridge and material deposited at a sufficiently large oblique angle forms the banks separately. Typical VTB's have bridges 1000 A thick and 0.4 micrometers long with the banks 7 micrometers thick and R sub n approx. O.1 omega. The method can also form other non-hysteretic weak links such as the SNS junction. (Author)

Descriptors :   *PATENTS, *DEPOSITION, *ELECTRON BEAMS, *LITHOGRAPHY, *MATERIALS, ELECTRONS, LAYERS, ELECTRONIC EQUIPMENT, THINNESS

Subject Categories : Solid State Physics
      Electricity and Magnetism
      Particle Accelerators

Distribution Statement : APPROVED FOR PUBLIC RELEASE