Accession Number : ADD013225
Title : Dual-Gate Deep-Depletion Technique for Carrier-Generation-Lifetime Measurement.
Descriptive Note : Patent, Filed 6 Mar 81, patented 10 Jan 84,
Corporate Author : DEPARTMENT OF THE NAVY WASHINGTON DC
Personal Author(s) : Barth, Phillip W
Report Date : 10 Jan 1984
Pagination or Media Count : 6
Abstract : This patent discloses a method for investigating the quality of dielectrically isolated thin film semiconductor layers in inversion-mode MOS devices having dual-gate control capabilities which allow two channels to be created in the semiconductor film. With one channel conducting and a drain voltage providing operation in the saturation region, a step voltage is applied to the gate associated with the second channel which has a transient effect on the current in the first channel. This transient may be analyzed to measure the generation lifetime and other parameters in the body of the device.
Descriptors : *PATENTS, *METAL OXIDE SEMICONDUCTORS, *SEMICONDUCTOR DEVICES, AVALANCHE DIODES, ELECTRIC CHARGE, CAPACITANCE, DEPLETION, THIN FILMS, SILICON COATINGS, SEMICONDUCTING FILMS, GATES(CIRCUITS), VOLTAGE, CARRIER MOBILITY, SUBSTRATES, THRESHOLD EFFECTS, INVERSION, CHANNELS, ELECTRIC CURRENT
Subject Categories : Solid State Physics
Electrical and Electronic Equipment
Distribution Statement : APPROVED FOR PUBLIC RELEASE