Accession Number : ADD013228
Title : Monolithic Combined Charge Transfer and Surface Acoustic Wave Device.
Descriptive Note : Patent, Filed 29 Sep 82, patented 28 Aug 84,
Corporate Author : DEPARTMENT OF THE NAVY WASHINGTON DC
Personal Author(s) : Green, Jonathan B ; Kino, Gordon S
Report Date : 28 Aug 1984
Pagination or Media Count : 5
Abstract : This patent discloses novel technique for fabrication of a new class of surface acoustic wave (SAW) signal processing devices. Substrates of non-piezoelectric silicon or weakly piezoelectric gallium arsenide are prepared and a thin film of a piezoelectric material, such as zinc oxide, is deposited on the substrate. Interdigital transducers are fabricated at each end of the device to inject/receive SAW signals. A row of P-N diodes is constructed in the substrate underneath the SAW beam path and a metal electrode is deposited on top of the zinc oxide film. The diodes may be serially addressed/controlled by a variety of devices external to the SAW beam path, but fabricated on the same substrate and the new device used to provide transformation between high-frequency signals and low-frequency signals having the same time-bandwidth product.
Descriptors : *PATENTS, *SURFACE ACOUSTIC WAVE DEVICES, *FABRICATION, PIEZOELECTRIC MATERIALS, ZINC OXIDES, LAYERS, GALLIUM ARSENIDES, SILICON, SEMICONDUCTOR DIODES, SHIFT REGISTERS, FIELD EFFECT TRANSISTORS, MONOLITHIC STRUCTURES(ELECTRONICS)
Subject Categories : Line, Surface and Bulk Acoustic Wave Devices
Mfg & Industrial Eng & Control of Product Sys
Distribution Statement : APPROVED FOR PUBLIC RELEASE