Accession Number : ADD013531
Title : Fabrication of Semiconductor Devices in Recrystallized Semiconductor Films on Electrooptic Substrates.
Descriptive Note : Patent, Filed 3 Oct 83, patented 17 Mar 87,
Corporate Author : DEPARTMENT OF THE NAVY WASHINGTON DC
Personal Author(s) : Reedy, Ronald E
Report Date : 17 Mar 1987
Pagination or Media Count : 11
Abstract : This invention relates to a process of manufacturing an integrated structure in which optical signals can be processed in a electrooptic material such as lithium tantalate and electrical signals can be processed in a semiconductor material such as silicon. Microelectronic semiconductors are fabricated in the semiconductor material and electrooptic devices are fabricated in the electrooptic material. Devices made by the process of the present invention are also disclosed.
Descriptors : *ELECTROOPTICS, *INTEGRATED SYSTEMS, *MICROELECTRONICS, *SEMICONDUCTING FILMS, *SEMICONDUCTOR DEVICES, *SEMICONDUCTORS, *PATENTS, ELECTRICITY, FABRICATION, LITHIUM TANTALATES, MATERIALS, OPTICS, SIGNALS, SILICON, SUBSTRATES
Subject Categories : Solid State Physics
Electrical and Electronic Equipment
Distribution Statement : APPROVED FOR PUBLIC RELEASE