Accession Number : ADD013720
Title : Method of Etching Zirconium Diboride.
Descriptive Note : Patent Application, Filed 31 Mar 88,
Corporate Author : DEPARTMENT OF THE ARMY WASHINGTON DC
Personal Author(s) : Heath, Linda S ; Kwiatkowski, Bonnie
Report Date : 31 Mar 1988
Pagination or Media Count : 10
Abstract : The invention described herein may be manufactured, used, and licensed by or for the Government for governmental purposes without the payment to us of any royalty thereon. This invention relates in general to a method of etching zirconium diboride, zirconium diboride(ZrB2) and in particular to a method of dry etching a thin film of ZrB2 that has been deposited onto a substrate and patterned using photolithography. U.S. patent application S.N. 156, 124, filed 16 February, 1988, of Linda S. Heath for Method of Etching Titanium Diboride and assigned to a common assignee and with which this application is copending describes and claims a method of etching titanium diboride with a dry etch. Zirconium diboride, like titanium diboride, TiB2, has become of interest in laboratory research because of its resistance to change or degradation at high temperatures.
Descriptors : *BORIDES, *ETCHING, *PHOTOLITHOGRAPHY, *ZIRCONIUM, *PATENT APPLICATIONS, *THIN FILMS, DEGRADATION, DRY MATERIALS, LABORATORY TESTS, TITANIUM BORIDE, THERMAL STABILITY, SPUTTERING, GALLIUM ARSENIDES, DIFFUSION COATINGS, SCHOTTKY BARRIER DEVICES
Subject Categories : Electrical and Electronic Equipment
Solid State Physics
Distribution Statement : APPROVED FOR PUBLIC RELEASE