Accession Number : ADD013742
Title : Formation of Thin-Film Resistors on Silicon Substrates.
Descriptive Note : Patent Application, Filed 26 Feb 88,
Corporate Author : DEPARTMENT OF THE AIR FORCE WASHINGTON DC
Personal Author(s) : Schnable, George L
Report Date : 26 Feb 1988
Pagination or Media Count : 14
Abstract : The present invention relates broadly to thin-film resistors and in particular to the formation of thin-film resistors on silicon substrates by ion implantation. A method of making thin film resistor structures for radiation-hardened integrated circuits is disclosed. The resistor is formed using a thin-film metallic conductor layer such as tantalum or chromium silicide which is deposited by ion implantation on the surface of fused phosphosilicate glass (PSC) or borophosphosilicate glass (BPSG) substrate. Implantation is at an energy level which provides sufficient penetration to insure good adhesion and the resistor is annealed at temperatures up to 700 C. The resistor is formed and annealed prior to deposition of metal, e.g. aluminum, on the substrate. Advantages of ion implantation include very accurate control of dosage, and good adhesion of deposited films.
Descriptors : *FILM RESISTORS, *INTEGRATED CIRCUITS, *RADIATION HARDENING, *SILICIDES, *THIN FILMS, *PATENT APPLICATIONS, ADHESION, ALUMINUM, ANNEALING, CHROMIUM, CONTROL, DEPOSITION, DOSAGE, ENERGY LEVELS, FILMS, ION IMPLANTATION, METALS, RESISTORS, SILICON, STRUCTURES, SUBSTRATES, TANTALUM, TEMPERATURE
Subject Categories : Electrical and Electronic Equipment
Distribution Statement : APPROVED FOR PUBLIC RELEASE