Accession Number : ADD013990
Title : Radio Frequency Plasma Generator.
Descriptive Note : Patent, Filed 12 Jun 87, patented 20 Dec 88,
Corporate Author : DEPARTMENT OF THE AIR FORCE WASHINGTON DC
Personal Author(s) : O'Loughlin, James P
Report Date : 20 Dec 1988
Pagination or Media Count : 9
Abstract : A plasma generator for exciting electrons in the plasma to a uniform energy level. In a preferred embodiment, two sets of mutually perpendicular electrodes surround a container of gas, with one set being driven through a ninety degree phase shifter to establish a circularly polarized field in the space within the container. Alternative means are disclosed for launching circularly polarized RF waves into the container of gas. A desired level of uniform electron energy is achieved by establishing the proper relationship between the frequency and magnitude of the applied circularly polarized field and the mean free path of the electrons in the plasma.
Descriptors : *PLASMA GENERATORS, *RADIOFREQUENCY, CIRCULAR, CONTAINERS, ELECTRODES, ELECTRON ENERGY, ELECTRONS, ENERGY LEVELS, GASES, MEAN FREE PATH, PHASE SHIFT CIRCUITS, POLARIZATION, RIGHT ANGLES
Subject Categories : Plasma Physics and Magnetohydrodynamics
Distribution Statement : APPROVED FOR PUBLIC RELEASE