Accession Number : ADD014105

Title :   Solid State Gas Pressure Sensor.

Descriptive Note : Patent, Filed 14 May 87, patented 14 Mar 89,

Corporate Author : DEPARTMENT OF THE AIR FORCE WASHINGTON DC

Personal Author(s) : Halvis, James ; Bluzer, Nathan ; Shiskowski, Robert

Report Date : 14 Mar 1989

Pagination or Media Count : 5

Abstract : A solid state gas pressure sensor has a resistor of polysilicon deposited upon a dielectric substrate which electrically isolates and thermally prevents heat transfer to other devices thereon. A constant voltage is applied to the resistor. Depending upon the gas pressure over the sensor, a given current will be output once temperature equilibrium is established. A change in the gas pressure changes the output current of the resistor. The output current indicative of pressure is temperature corrected. Patents. (MJM)

Descriptors :   *DIELECTRICS, *GASES, *PATENTS, *POLYSILICONS, *PRESSURE, *DETECTORS, EQUILIBRIUM(GENERAL), HEAT TRANSFER, OUTPUT, RESISTORS, SUBSTRATES, TEMPERATURE, VOLTAGE

Subject Categories : Inorganic Chemistry
      Electrical and Electronic Equipment

Distribution Statement : APPROVED FOR PUBLIC RELEASE