Accession Number : ADD014171

Title :   Method of Modifying the Dielectric Properties of an Organic Polymer Film.

Descriptive Note : Patent Application, Filed 12 Jun 89,

Corporate Author : DEPARTMENT OF THE ARMY WASHINGTON DC

Personal Author(s) : Binder, Michael ; Mammone, Robert J

Report Date : 12 Jun 1989

Pagination or Media Count : 10

Abstract : This invention relates in general to a method of modifying the dielectric properties of an organic polymer film by ion implantation and in particular to such a method for modifying the dielectric properties of a film of a Poly-p-Xylylene formed by vapor deposition polymerization. Poly-p-Xylylenes, also known by their trade name of Parylene, are well known conformal coatings that are primarily used as insulators and isolators in electronics. These materials are interesting because of their ability to provide ultrathin films that conform to substrates of varied geometrical shapes and irregularities. Patent applications. (jes)

Descriptors :   *DIELECTRIC PROPERTIES, *POLYMERIZATION, COATINGS, CONFORMAL STRUCTURES, ELECTRONICS, GEOMETRIC FORMS, INSULATION, ION IMPLANTATION, PATENT APPLICATIONS, POLYMERIC FILMS, POLYMERS, SUBSTRATES, THIN FILMS, VAPOR DEPOSITION

Subject Categories : Polymer Chemistry

Distribution Statement : APPROVED FOR PUBLIC RELEASE