Accession Number : ADD014421

Title :   Detection of Oxygen in Thin Films.

Descriptive Note : Patent, Filed 29 Sep 86, patented 12 Jan 88,

Corporate Author : DEPARTMENT OF THE NAVY WASHINGTON DC

Personal Author(s) : Green, Arnold K ; Hammond, Robert H

Report Date : 12 Jan 1988

Pagination or Media Count : 5

Abstract : This invention pertains to the field of measurement and testing. More particularly, the invention pertains to measurement of the gas content of material. The subject invention involves the deposition, on a first thin film layer which requires deposition in the presence of a substance which would otherwise escape from the layer prior to analysis of the layer for the substance, of a second layer, which captures the substance for subsequent analysis in the second layer, and involves the deposition on the second layer of a third layer which seals the second layer of a third layer which seals the second layer against entry of the substance from the environment. It is an object of the present invention to provide a method for the determination of the presence of such a substance in the first layer during deposition of the substance in a substrate. Another object is to provide a method using relatively simple and conventional apparatus in analysis for such a substance in a different vacuum chamber than that in which the first layer was deposited and after transfer of the films and substrate through the usual ambient terrestrial environment. A further object is to provide such a method particularly useful for determining the presence of oxygen within a growing Niobium Germanium film during vacuum deposition thereof at a relatively high temperature. Patents. (AW)

Descriptors :   *DETECTION, *PATENTS, *GAS ANALYSIS, *OXYGEN, *THIN FILMS, *VACUUM DEPOSITION, DEPOSITION, EARTH(PLANET), ENVIRONMENTS, FILMS, GERMANIUM, HIGH TEMPERATURE, INVENTIONS, LAYERS, MEASUREMENT, NIOBIUM, PATENTS, SUBSTRATES, THINNESS, TRANSFER, VACUUM CHAMBERS

Subject Categories : Physical Chemistry

Distribution Statement : APPROVED FOR PUBLIC RELEASE