Accession Number : ADD014498

Title :   Formation of High T(c) Superconducting Films by Organometallic Chemical Vapor Deposition.

Descriptive Note : Patent Application, Filed 16 May 89,

Corporate Author : DEPARTMENT OF THE NAVY WASHINGTON DC

Personal Author(s) : Berry, Alan ; Gaskill, David ; Holm, Ronald ; Cukauskas, Edward

Report Date : 16 May 1989

Pagination or Media Count : 25

Abstract : This invention relates to a method of forming high Tc superconducting films by organometallic chemical vapor deposition. More specifically, this invention relates to a method of forming superconducting films on a semiconductor surface by chemical vapor deposition of volatile organometallic compounds of the rare earth and alkaline earth elements, and copper. Keywords: Reports, Periodicals, Military publications, Scientific literature. (eg)

Descriptors :   *CHEMICAL REACTIONS, *FILMS, *ORGANOMETALLIC COMPOUNDS, *SUPERCONDUCTORS, *VAPOR DEPOSITION, ALKALINE EARTH COMPOUNDS, COPPER, MILITARY PUBLICATIONS, RARE EARTH ELEMENTS, SCIENTIFIC LITERATURE, SEMICONDUCTORS, SURFACES, VOLATILITY

Subject Categories : Information Science

Distribution Statement : APPROVED FOR PUBLIC RELEASE