Accession Number : ADD015655

Title :   Laser Texturing.

Descriptive Note : Patent, Filed 26 Sep 90, patented 17 Nov 92,

Corporate Author : DEPARTMENT OF THE NAVY WASHINGTON DC

Personal Author(s) : Russell, Stephen D ; Sexton, Douglas A ; Kelley, Eugene P

Report Date : 17 Nov 1992

Pagination or Media Count : 12

Abstract : A non-contact method to impart a texture to a surface using laser irradiation uses an excimer laser to illuminate a sample immersed in a halocarbon ambient thereby initiating a photo/thermal chemical reaction which etches the sample only in the area illuminated with sufficient laser fluence. The resulting etched area can be repetively illuminated and etched to provide a textured surface to reduce extraneous reflections, or for micromachining, decorative texturing and marking. This technique is particularly well suited to improve the performance of backside illuminated CCDs by reducing the background (dark) signal, increase resolution and responsivity uniformity. The technique is compatible with other laser processing procedures and can be implemented with a variety of CCD enhancements such as improved dark current and blue response from laser doping or activation of backside implants. The non-corrosive nature of the halocarbon ambients allows the laser texturing process to be performed on pre-packaged, pretested devices and therefore can salvage parts which had failed performance specifications

Descriptors :   *CHARGE COUPLED DEVICES, *EXCIMERS, *IRRADIATION, *TEXTURE, *PATENTS, *LASER BEAMS, ACTIVATION, CHEMICAL REACTIONS, DOPING, LASERS, PROCESSING, REFLECTION, RESOLUTION, RESPONSE, SPECIFICATIONS, SURFACES, LASER APPLICATIONS, HALOCARBON PLASTICS, ETCHING, PHOTOTHERMAL PROPERTIES, ILLUMINATION, SURFACE ROUGHNESS, SILICON

Subject Categories : Lasers and Masers
      Electrical and Electronic Equipment
      Optics

Distribution Statement : APPROVED FOR PUBLIC RELEASE