Accession Number : ADD015734
Title : Method and Apparatus for Characterizing the Quality for Electrically Thin Semiconductor Films.
Descriptive Note : Patent, Filed 23 Apr 90, patented 23 Mar 93,
Corporate Author : DEPARTMENT OF THE NAVY WASHINGTON DC
Personal Author(s) : Burgener, Mark L ; Garcia, Graham A ; Reedy, Ronald E
Report Date : 23 Mar 1993
Pagination or Media Count : 52
Abstract : A method and apparatus for characterizing the quality of an electrically thin semiconductor film and its interfaces with adjacent materials by employing a capacitor and a topside electrical contact on the same side of the electrically thin semiconductor film to thereby permit the taking of capacitance-voltage (C-V) measurements. A computer controlled C-V measuring system is operatively coupled to the contact and capacitor to modulate the potential on the capacitor. Variation of the voltage applied to the capacitor enables modulation of the potential applied to the film to thereby vary the conductivity of the film between the capacitor gate node and the topside contact.
Descriptors : *PATENTS, *THIN FILMS, *SEMICONDUCTORS, ELECTRICAL PROPERTIES, TEST METHODS, INTERFACES, MATERIALS, CAPACITORS, ELECTRIC CONTACTS, VOLTAGE, MEASUREMENT, COUPLINGS, MODULATION, POTENTIAL ENERGY, CONDUCTIVITY, GATES(CIRCUITS), WAFERS, ELECTRIC CURRENT
Subject Categories : Electrical and Electronic Equipment
Electricity and Magnetism
Distribution Statement : APPROVED FOR PUBLIC RELEASE