Accession Number : ADD015954
Title : Apparatus for Performing Growth of Compound Thin Films.
Descriptive Note : Patent, Filed 11 Dec 81, patented 28 Jun 83,
Corporate Author : DEPARTMENT OF THE NAVY WASHINGTON DC
Personal Author(s) : Suntola, Tuomo S ; Pakkala, Arto J ; Lindfors, Sven G
Report Date : 28 Jun 1983
Pagination or Media Count : 16
Abstract : A method and an apparatus are provided for performing growth of compound thin films by alternately repeating separate surface reactions of the substances comprising the compound. A carrier gas affects a diffusion barrier between the surface reaction steps to be separated from each other. The gas phase diffusion barrier is also applied to separate the source regions of different reacting vapors both from each other and from the surface reaction zone.
Descriptors : *PATENTS, *THIN FILMS, *INTERMETALLIC COMPOUNDS, *METAL FILMS, VAPOR PRESSURE, ATOMIC STRUCTURE
Subject Categories : Crystallography
Solid State Physics
Distribution Statement : APPROVED FOR PUBLIC RELEASE