Accession Number : ADD015988
Title : Conformal Method of Fabricating and Optical Waveguide on a Semiconductor Substrate.
Descriptive Note : Patent, Filed 30 Apr 92, patented 24 Aug 93,
Corporate Author : DEPARTMENT OF THE NAVY WASHINGTON DC
Personal Author(s) : Russell, Stephen D
Report Date : 24 Aug 1993
Pagination or Media Count : 7
Abstract : A method for fabricating a conformal optical waveguide on a semiconductor substrate which results in an improved conformal processing method of producing ferroelectric ceramic waveguides that is integratable with conventional electronic and optoelectronic devices. First, a patterning of a desired waveguide configuration is made on it desired semiconductor substrate. A conformal confinement layer is fabricated in the pattern of the desired waveguide configuration on the semiconductor substrate. The conformal confinement layer has an index of refraction. Next, the method calls for a placing of a sol-gel waveguide precursor in the conformal confinement layer. Next the spin casting of a sol-gel waveguide precursor shapes a sol-gel conformal waveguide layer in the conformal confinement layer on the semiconductor substrate. The annealing of the spin cast sol-gel conformal waveguide layer forms the conformal optical waveguide which has an index of refraction that is greater than the refractive index of the conformal confinement layer.
Descriptors : *OPTICAL WAVEGUIDES, *SEMICONDUCTORS, *SUBSTRATES, *PATENTS, ANNEALING, CASTING, CONFIGURATIONS, ELECTRONICS, LAYERS, PATTERNS, PRECURSORS, PROCESSING, REFRACTION, REFRACTIVE INDEX, SHAPE, FABRICATION, FERROELECTRIC MATERIALS, CERAMIC MATERIALS, ELECTROOPTICS
Subject Categories : Fiber Optics and Integrated Optics
Electrical and Electronic Equipment
Ceramics, Refractories and Glass
Electricity and Magnetism
Distribution Statement : APPROVED FOR PUBLIC RELEASE